Semiconductor - Connected to the future

SmarActs Exchangeable Drive-Units (EDUs) are the solution for all industrial and high availability applications of stick-slip piezo drives.

POG develops and manufactures precision optics and optomechanical systems for the DUV-VIS-NIR spectral range. These systems are integral components in highly complex systems for the inspection of layer thickness, structural elements and alignment and process control.

For specialized applications, we produce electrostatic chucks with high flatness that ensure safe and stable positioning throughout the entire process.